WAFER SORTER SYSTEM (5FOUP)

• Applicable Substrate : Wafer 8 /1 2 inch (Silicon, molded, glass wafer)
• Wafer Warpage : +/-3mm
• Applicable Tools : 8 / 12 inch Metal Cassette / FOUP
• Class : 1000
• Control : PC Control + Touch Monitor
• Utility : AC 220V 50/60 Hz 3Phase / 7BAR & ø12 x 1ea